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Extreme ultraviolet interferometric measurements of diffraction-limited optics

Journal Article · · Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures
DOI:https://doi.org/10.1116/1.590939· OSTI ID:800250
 [1]; ;
  1. LBNL Library
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No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
800250
Report Number(s):
LBNL/ALS--1722
Journal Information:
Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures, Journal Name: Journal of Vacuum Science and Technology B: Microelect. & Nanometer Structures Journal Issue: 6 Vol. 17
Country of Publication:
United States
Language:
English

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