Tolerancing of diffraction-limited Kirkpatrick-Baez synchrotron beamline optics for extreme-ultraviolet metrology
- LBNL Library
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE Director, Office of Science. Office of Basic Energy Studies (US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 789166
- Report Number(s):
- LBNL--48607
- Journal Information:
- Applied Optics, Journal Name: Applied Optics Journal Issue: 22 Vol. 40; ISSN 0003-6935; ISSN APOPAI
- Country of Publication:
- United States
- Language:
- English
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