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Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy

Journal Article · Thu Dec 09 23:00:00 EST 1999 · Applied Optics

DOI:https://doi.org/10.1364/AO.38.007252· OSTI ID:800248

Naulleau, Patrick P ^[1]; Goldberg, Kenneth A; Lee, S; Chang, C; Attwood, David T; Bokor, Jeffrey

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Research Organization:: Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (US)

Sponsoring Organization:: US Department of Energy (US)

DOE Contract Number:: AC03-76SF00098

OSTI ID:: 800248

Report Number(s):: LBNL/ALS--1718

Journal Information:: Applied Optics, Journal Name: Applied Optics Journal Issue: 35 Vol. 38; ISSN 0003-6935; ISSN APOPAI

Country of Publication:: United States

Language:: English

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