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The EUV phase-shifting point-diffraction interferometer: asub-angstrom reference-wave accuracy wavefront metrology tool

Journal Article · · Applied Optics
; ; ; ; ; ;

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
Sponsoring Organization:
USDOE Director, Office of Science
DOE Contract Number:
AC02-05CH11231
OSTI ID:
893209
Report Number(s):
LBNL--43179
Journal Information:
Applied Optics, Journal Name: Applied Optics Journal Issue: 35 Vol. 38; ISSN 0003-6935; ISSN APOPAI
Country of Publication:
United States
Language:
English

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Related Subjects

47 OTHER INSTRUMENTATION
ACCURACY
DIFFRACTION
EXTREME ULTRAVIOLET RADIATION
INTERFEROMETERS
METRICS
PHASE SHIFT
interferometry point-diffraction interferometry extremeultraviolet lithography phase-shifting interferometry accuracy