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Stress Engineering During Metalorganic Chemical Vapor Deposition of AlGaN/GaN Distributed Bragg Reflectors

Journal Article · Tue Nov 14 23:00:00 EST 2000 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.126007· OSTI ID:767862

WALDRIP, KAREN ^[1]; HAN, JUNG; FIGIEL, JEFFREY J; ZHOU, H; NURMIKKO, A V

Sandia National Laboratories

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Research Organization:: Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)

Sponsoring Organization:: US Department of Energy (US)

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 767862

Report Number(s):: SAND2000-2866J

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
BRAGG REFLECTION
CHEMICAL VAPOR DEPOSITION
ENGINEERING
STRESS ANALYSIS