Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing
Hard diamond-like carbon (DLC) films have been prepared on PMMA (Polymethyl methacrylate), glass, and Si(100) substrates using C{sub 2}H{sub 2}-Ar plasma immersion ion processing (PIIP). The composition, structure, and properties of the films were investigated with regard to variation of the deposition parameters. It was found that the modulation of reactive gas composition during PIIP could enhance the formation of DLC films with an increased sp{sup 3} bonding structure, improved surface smoothness, high density and high hardness. An optimal combination of good optical properties and high hardness was highly dependent on the control of hydrogen content in the DLC films. Tribological tests showed that DLC-coated glass and PMMA samples exhibited a reduced friction coefficient and enhanced wear resistance relative to uncoated glass and PMMA materials. The effects of ion energy and gas composition during PIIP deposition on the formation of optically transparent and wear resistant DLC films are discussed.
- Research Organization:
- Los Alamos National Lab., Los Alamos, NM (US)
- Sponsoring Organization:
- USDOE Office of Energy Research (ER) (US)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 756933
- Report Number(s):
- LA-UR-99-812
- Country of Publication:
- United States
- Language:
- English
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