Structure and optical properties of diamondlike carbon synthesized by plasma immersion ion processing
- Los Alamos National Laboratory, Materials Science and Technology Division, Los Alamos, New Mexico 87545 (United States)
- Los Alamos National Laboratory, Chemical Science and Technology Division, Los Alamos, New Mexico 87545 (United States)
Hard and transparent diamondlike carbon (DLC) films have been prepared on room-temperature substrates by using a C{sub 2}H{sub 2}{endash}Ar plasma immersion ion processing (PIIP) method. The optical properties of the DLC films with different thicknesses deposited on PMMA (polymethyl methacrylate), silicon wafers, and glass plates were systematically examined. It was found that careful control of substrate bias voltage was needed for favorable growth of DLC films with low atomic hydrogen content, high hardness and wear resistance, and excellent optical properties. The resultant DLC films exhibited a low friction coefficient, high optical gap energy, and very high optical transmittance both in infrared and visible light ranges. The study confirmed that C{sub 2}H{sub 2}{endash}Ar PIIP with low negative bias voltages and suitable C{sub 2}H{sub 2}/Ar gas ratios can produce optically transparent and hard DLC films on optical materials. {copyright} {ital 1999 Materials Research Society.}
- OSTI ID:
- 341369
- Journal Information:
- Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 5 Vol. 14; ISSN JMREEE; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
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