Optical properties of diamond-like carbon synthesized by plasma immersion ion processing
- Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
- Chemical Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
- Physics Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
Hard and transparent diamond-like carbon (DLC) films have been prepared on low temperature substrates by using the C{sub 2}H{sub 2}-Ar plasma immersion ion processing (PIIP) method. The optical properties of the DLC films deposited on poly(methylmethacrylate) (PMMA), silicon wafers, and glass plates were systematically examined. It was found that careful control of substrate bias was needed for favorable growth of DLC films with low atomic hydrogen contents, high hardness and mass densities, and excellent optical properties. The resultant DLC films exhibited a high hardness of above 22 GPa, an optical gap energy larger than 1.9 eV, a low refractive index of 1.87, and very high optical transmittance in the visible light range. The study confirmed that C{sub 2}H{sub 2}-Ar PIIP with low negative bias voltages and suitable C{sub 2}H{sub 2}/Ar gas ratios can process optically transparent and hard protective DLC films on PMMA plastics. {copyright} {ital 1999 American Vacuum Society.}
- OSTI ID:
- 336664
- Report Number(s):
- CONF-9806211--
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 2 Vol. 17; ISSN JVTBD9; ISSN 0734-211X
- Country of Publication:
- United States
- Language:
- English
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