Characterization and enhanced properties of plasma immersion ion processed diamond-like carbon films. [C]

Journal Article · Wed Sep 01 04:00:00 EDT 1999 · Journal of Vacuum Science and Technology, A

DOI:https://doi.org/10.1116/1.581991· OSTI ID:6439664

He, X M; Bardeau, J; Walter, K C; Nastasi, M ^[1]

---

1. Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)

The formation and properties of diamond-like carbon (DLC) films prepared on silicon substrates at room temperature, using C[sub 2]H[sub 2][endash]Ar plasma immersion ion processing, are investigated with respect to film deposition parameters. Decreases in the reactive gas-flow ratios of C[sub 2]H[sub 2] to Ar(F[sub C[sub 2]H[sub 2]]/F[sub Ar]) or the gas pressure were found to decrease the hydrogen content, increase the density and hardness, and improve the surface finish of the DLC films, all of which led to enhanced tribological properties. Decreasing the friction coefficient requires increasing the hardness of the film and smoothing its surface, whereas increasing the wear resistance correlates with reducing both the hydrogen content and residual stress in DLC films. High hardness and optimum tribological properties were reached as the growth of DLC films was subjected to low-energy ion impingement, which was induced by a [minus]150 V pulsed bias from the C[sub 2]H[sub 2][endash]Ar plasma produced at low reactive gas pressures with low F[sub C[sub 2]H[sub 2]]/F[sub Ar] ratios. [copyright] [ital 1999 American Vacuum Society.]

• OSTI ID: 6439664
• Journal Information: Journal of Vacuum Science and Technology, A, Journal Name: Journal of Vacuum Science and Technology, A Vol. 17:5; ISSN 0734-2101; ISSN JVTAD6
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700300 -- Plasma Physics & Fusion Research-- (1992-)
AMORPHOUS STATE
CARBON
CHEMICAL REACTIONS
DENSITY
ELEMENTS
FILMS
FRICTION
HARDNESS
HYDROGEN
ION IMPLANTATION
MECHANICAL PROPERTIES
METHYLENE RADICALS
NONMETALS
PHYSICAL PROPERTIES
PLASMA
RADICALS
STRESSES
THIN FILMS
TRIBOLOGY
WEAR RESISTANCE