Characterization of chromium--gold films for hybrid microcircuits. Final report
An existing chromium-gold electron beam evaporation system was evaluated for its ability to evaporate 6000 nm (60,000 A) of gold to meet certain hybrid microcircuit specifications. The evaluation resulted in a new gold crucible design for the electron beam evaporation system. The new design ensures a longer crucible life and increases the gold evaporation rate by a factor of four. The gold film evaporated at the new rate was shown to meet the bondability, solderability, and resistivity requirements of certain hybrid microcircuits.
- Research Organization:
- Bendix Corp., Kansas City, Mo. (USA)
- DOE Contract Number:
- E(29-1)-613
- OSTI ID:
- 7335687
- Report Number(s):
- BDX-613-1564(Rev.)
- Country of Publication:
- United States
- Language:
- English
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