Di- and tri-carboxylic-acid-based etches for processing high temperature superconducting thin films and related materials

Journal Article · Sun May 01 04:00:00 EDT 1994 · Journal of Materials Research; (United States)

DOI:https://doi.org/10.1557/JMR.1994.1126· OSTI ID:7279913

Ginley, D S; Barr, L ^[1]; Ashby, C I.H.; Plut, T A; Urea, D; Siegal, M P ^[2]; Martens, J S; Johansson, M E ^[3]

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1. National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, Colorado 80401 (United States)
2. Sandia National Laboratories, Albuquerque, New Mexico 87185-5800 (United States)
3. Conductus, Sunnyvale, California 94086 (United States)

The development of passive and active electronics from high-temperature superconducting thin films depends on the development of process technology capable of producing appropriate feature sizes without degrading the key superconducting properties. We present a new class of chelating etches based on di- and tri-carboxylic acids that are compatible with positive photoresists and can produce sub-micron feature sizes while typically producing increases the microwave surface resistance at 94 GHz by less than 10%. This simple etching process works well for both the Y--Ba--Cu--O and Tl--Ba--Ca--Cu--O systems. In addition, we demonstrate that the use of chelating etches with an activator such as HF allows the etching of related oxides such as LaAlO[sub 3], which is a key substrate material, and Pb(Zr[sub 0.53]Ti[sub 0.47])O[sub 3] (PZT) which is a key ferroelectric material for HTS and other applications such as nonvolatile memories.

• OSTI ID: 7279913
• Journal Information: Journal of Materials Research; (United States), Journal Name: Journal of Materials Research; (United States) Vol. 9:5; ISSN JMREEE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CARBOXYLIC ACIDS
CHALCOGENIDES
CHELATING AGENTS
COPPER COMPOUNDS
COPPER OXIDES
CUPRATES
ETCHING
FILMS
HIGH-TC SUPERCONDUCTORS
ORGANIC ACIDS
ORGANIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PROCESSING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE FINISHING
THALLIUM COMPOUNDS
THALLIUM OXIDES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES