Chemical etching of Y-Cu-Ba-O thin films

Journal Article · Mon May 02 04:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99695· OSTI ID:5418676

Shih, I; Qiu, C X

Thin films of Y-Ba-Cu-O have been deposited by rf sputtering using a stoichiometric target on alumina, zirconia, and Y/sub 2/O/sub 3/ coated silicon substrates. After a brief heat treatment in oxygen, a resistive transition was observed with an onset temperature from 89 to 94.6 K. Etching experiments of the as-deposited films have been made to determine the etching rates of the compound. It was found that reproducible results can be readily obtained using the following solutions: H/sub 3/PO/sub 4//H/sub 2/O, HNO/sub 3//H/sub 2/O, and HCl/H/sub 2/O. Using a positive photoresist technology, 3 ..mu..m lines have been successfully produced by etching in these solutions. The present patterning process was found to have no deleterious effect on the superconducting characteristics of the Y-Ba-Cu-O films.

• Research Organization: Electrical Engineering Department, McGill University, 3480 University Street, Montreal H3A 2A7, Canada
• OSTI ID: 5418676
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:18; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DATA
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ETCHING
EXPERIMENTAL DATA
FABRICATION
FILMS
HEAT TREATMENTS
HYDROCHLORIC ACID
HYDROGEN COMPOUNDS
INFORMATION
INORGANIC ACIDS
LOW TEMPERATURE
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PEROVSKITES
PHYSICAL PROPERTIES
STOICHIOMETRY
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE FINISHING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
WATER
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES