Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials
Patent
·
OSTI ID:6273988
A method is described of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x](O < x < 1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x]; depositing a photoresist onto said thin film of a dopant; shining light through a mask containing a pattern for a desired circuit configuration and onto said photoresist; developing said photoresist to remove portions of said photoresist shined by the light and to selectively expose said dopant film; etching said selectively exposed dopant film from said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x] to form a pattern of dopant; and heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x].
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- Patent Number(s):
- US 5238913; A
- Application Number:
- PPN: US 7-860337
- OSTI ID:
- 6273988
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ETCHING
FABRICATION
FILMS
HEATING
MASKING
MATERIALS
MICROELECTRONIC CIRCUITS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUBSTRATES
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE FINISHING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ETCHING
FABRICATION
FILMS
HEATING
MASKING
MATERIALS
MICROELECTRONIC CIRCUITS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUBSTRATES
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE FINISHING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS