Superconducting microcircuitry by the microlithographic patterning of superconducting compounds and related materials

Patent · Tue Aug 24 00:00:00 EDT 1993

OSTI ID:6273988

Coppa, N V

A method is described of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x](O < x < 1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x]; depositing a photoresist onto said thin film of a dopant; shining light through a mask containing a pattern for a desired circuit configuration and onto said photoresist; developing said photoresist to remove portions of said photoresist shined by the light and to selectively expose said dopant film; etching said selectively exposed dopant film from said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x] to form a pattern of dopant; and heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba[sub 2]Cu[sub 3]O[sub 5+x].

• DOE Contract Number: W-7405-ENG-36
• Assignee: Dept. of Energy, Washington, DC (United States)
• Patent Number(s): US 5238913; A
• Application Number: PPN: US 7-860337
• OSTI ID: 6273988
• Resource Relation: Patent File Date: 30 Mar 1992
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
MICROELECTRONIC CIRCUITS
FABRICATION
SUPERCONDUCTING FILMS
ETCHING
MASKING
BARIUM OXIDES
COPPER OXIDES
DEPOSITION
DOPED MATERIALS
HEATING
SUBSTRATES
SUPERCONDUCTING DEVICES
SUPERCONDUCTIVITY
THIN FILMS
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
FILMS
MATERIALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
665412* - Superconducting Devices- (1992-)