Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials
Patent
·
OSTI ID:868896
- Los Alamos, NM
Superconducting microcircuits including a thin layer of Ba.sub.2 Cu.sub.3 O.sub.5+x (0
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 5238913
- OSTI ID:
- 868896
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
/505/204/216/
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circuits including
compounds
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desired circuit
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example
exposed
finally
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including
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layers
light
mask
materials
microcircuit
microcircuitry
microcircuits
microlithgraphic
pattern
patterning
patterns
period
photoresist
portion
prba
react
related
related materials
remove
reveal
stripped
substrate
sufficient
superconducting
superconducting compounds
superconductor
temperature
time
time sufficient
unneeded
yba
7-x
circuit
circuits including
compounds
covered
cu
desired
desired circuit
developed
diffuse
dopant
etched
example
exposed
finally
forming
heated
including
insulator
layer
layers
light
mask
materials
microcircuit
microcircuitry
microcircuits
microlithgraphic
pattern
patterning
patterns
period
photoresist
portion
prba
react
related
related materials
remove
reveal
stripped
substrate
sufficient
superconducting
superconducting compounds
superconductor
temperature
time
time sufficient
unneeded
yba