Silicon nitride synthesis in an atmospheric pressure convection - Stabilized arc

Journal Article · Thu Jun 01 04:00:00 EDT 1989 · Plasma Chemistry and Plasma Processing; (USA)

DOI:https://doi.org/10.1007/BF01054286· OSTI ID:7246998

Change, Yl; Young, R M; Pfender, E ^[1]

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1. Univ. of Minnesota, Minneapolis (USA)

Submicron {alpha}-, {beta}-, and amorphous-phase silicon nitride particles have been synthesized in an experimental plasma reactor, using metallic silicon and ammonia as reactants. Injection of ammonia at different locations of the reactor results in different yields. A maximum yield of 85 wt% has been achieved by injecting NH{sub 3} at both downstream and upstream locations of the reactor. The powders synthesized in this way contained approximately 60 wt% silicon nitride in crystal form with equal amounts of {alpha} and {beta} phases. The remainder consisted of the amorphous phase. The average size of the particles ranged from 50 to 90 nm, with a standard deviation of 1.47-1.87 depending on the location of ammonia injection. Seeding with 1 and 10 wt% of preexisting silicon nitride particles for fostering heterogeneous nucleation did not improve the yield, but it changed the particle size distribution.

• DOE Contract Number: FG02-85ER13433
• OSTI ID: 7246998
• Journal Information: Plasma Chemistry and Plasma Processing; (USA), Journal Name: Plasma Chemistry and Plasma Processing; (USA) Vol. 9:2; ISSN PCPPD; ISSN 0272-4324
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
320302 -- Energy Conservation
Consumption
& Utilization-- Industrial & Agricultural Processes-- Materials
320303 -- Energy Conservation
Consumption
& Utilization-- Industrial & Agricultural Processes-- Equipment & Processes
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
AMMONIA
ANNEALING
CHEMICAL REACTION YIELD
CHEMICAL REACTORS
COHERENT SCATTERING
DIFFRACTION
EFFICIENCY
ELECTRIC DISCHARGES
ELECTRON MICROSCOPY
ELEMENTS
ENERGY EFFICIENCY
EVAPORATION
FLUID FLOW
GAS FLOW
HEAT TREATMENTS
HYDRIDES
HYDROGEN COMPOUNDS
MICROSCOPY
NITRIDES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NUCLEATION
PARTICLE SIZE
PHASE STUDIES
PHASE TRANSFORMATIONS
PLASMA
PNICTIDES
POWDERS
SCATTERING
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON NITRIDES
SIZE
SYNTHESIS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
YIELDS