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Characterization of silicon nitride particles synthesized in an atmospheric-pressure convection-stabilized arc

Journal Article · · Plasma Chemistry and Plasma Processing; (USA)
DOI:https://doi.org/10.1007/BF01015827· OSTI ID:7246915
; ;  [1]
  1. Univ. of Minnesota, Minneapolis (USA)
Silicon nitride powders were synthesized in an atmospheric-pressure convection-stabilized arc using silicon and ammonia as reactants. The morphology and particle size distributions of the silicon nitride particles were characterized by SEM, TEM, and electron diffraction analyses. The silicon nitride particles collected in the plasma reactor were formed by either gas-condensed phase reactions or chemical vapor reactions. The morphologies of the particles formed by gas-condensed phase reactions consisted of {beta}-Si{sub 3}N{sub 4} prisms, {alpha}-Si{sub 3}N{sub 4} matte, {alpha}-Si{sub 3}N{sub 4} needles, and spaghetti-like whiskers. For the homogeneously nucleated particles, the morphologies included dendrites, needles, platelets, and amorphous particles. Most of the particles formed were aggregates with particle size distributions ranging from 500 to 1,500 {angstrom} depending on the location of injection of the reactants.
DOE Contract Number:
FG02-85ER13433
OSTI ID:
7246915
Journal Information:
Plasma Chemistry and Plasma Processing; (USA), Journal Name: Plasma Chemistry and Plasma Processing; (USA) Vol. 9:1; ISSN PCPPD; ISSN 0272-4324
Country of Publication:
United States
Language:
English