Kinetics of silicon monoxide ammonolysis for nanophase silicon nitride synthesis

Journal Article · Fri Nov 01 04:00:00 EST 1996 · Journal of the American Ceramic Society

DOI:https://doi.org/10.1111/j.1151-2916.1996.tb08730.x· OSTI ID:417781

Lin, D; Kimura, S ^[1]

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1. Oregon State Univ., Corvallis, OR (United States). Dept. of Chemical Engineering

Silicon monoxide vapor generated from Si/SiO{sub 2} mixed-powder compacts was used with NH{sub 3} to synthesize silicon nitride in a tubular flow reactor operated at temperatures in the range of 1,300--1,400 C. The ammonolysis of SiO with excess NH{sub 3} was very rapid, yielding three different types of silicon nitride at different longitudinal locations in the reactor: amorphous nanophase powder of an average size of about 20 nm, amorphous whiskers of a few micrometers in diameter, and {alpha}-polycrystals. The amorphous products were heat-treated for crystallization at temperatures between 1,300 and 1,560 C in a stream of dissociated NH{sub 3}, N{sub 2}, or N{sub 2}/H{sub 2} mixture gas. When dissociated NH{sub 3} was used, nanophase powder was crystallized at 1,300 C. The yield of nanophase silicon nitride from SiO varied from 13% to 43%, depending on operating conditions.

• Sponsoring Organization: USDOE
• OSTI ID: 417781
• Journal Information: Journal of the American Ceramic Society, Journal Name: Journal of the American Ceramic Society Journal Issue: 11 Vol. 79; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AMMONOLYSIS
AMORPHOUS STATE
CRYSTALLIZATION
EXPERIMENTAL DATA
KINETICS
PARTICLE SIZE
POWDERS
SILICON NITRIDES
SILICON OXIDES
SYNTHESIS
WHISKERS