Cubic zirconia as a high-quality facet coating for semiconductor lasers

Journal Article · Mon Aug 01 04:00:00 EDT 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.341807· OSTI ID:7199120

Chin, A K; Satyanarayan, A; Zarrabi, J H; Vetterling, W

In this paper we describe the properties of high-quality, semiconductor laser facet coatings based on yttria-stabilizied cubic zirconia (90-m% ZrO/sub 2//10-m% Y/sub 2/O/sub 3/). We have found that cubic zirconia films can be reproducibly deposited by electron-beam evaporation with an index of refraction of 1.98 at 6328 A, almost ideal for use as a single-layer antireflection coating for GaAs/GaAlAs-based lasers. ZrO/sub 2/ has a monoclinic crystal structure at room temperature, but changes to tetragonal, hexagonal, and cubic phases upon heating to higher temperatures. However, the addition of the Y/sub 2/O/sub 3/ stabilizes ZrO/sub 2/ in the cubic form, thus allowing electron-beam deposition of thin films of this material to be more controllable and reproducible without the usual addition of oxygen into the vacuum chamber during deposition. Preliminary aging tests of high-power GaAs/GaAlAs lasers show that cubic zirconia films suppress the photo-enhanced oxidation of laser facets that degrades device performance.

• Research Organization: Microelectronics Center, Polariod Corporation, 21 Osborn Street, Cambridge, Massachusetts 02139
• OSTI ID: 7199120
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 64:3; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
ALLOYS
ALUMINIUM ARSENIDES
ALUMINIUM COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BEAMS
COATINGS
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CUBIC LATTICES
DEPOSITION
DIELECTRIC MATERIALS
ELECTRON BEAMS
ELEMENTS
ENERGY BEAM DEPOSITION
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
LASERS
LEPTON BEAMS
MATERIALS
METALS
PARTICLE BEAMS
PERFORMANCE
PNICTIDES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR LASERS
STABILIZATION
SURFACE COATING
TRANSITION ELEMENTS
YTTRIUM ADDITIONS
YTTRIUM ALLOYS
ZIRCONIUM