Microstructure and phase composition of sputter-deposited zirconia-yttria films

Conference · Tue Nov 01 04:00:00 EST 1983

OSTI ID:5487840

Knoll, R W; Bradley, E R

Thin ZrO/sub 2/-Y/sub 2/O/sub 3/ coatings ranging in composition from 3 to 15 mole % Y/sub 2/O/sub 3/ were produced by rf sputter deposition. This composition range spanned the region on the equilibrium ZrO/sub 2/-Y/sub 2/O/sub 3/ phase diagram corresponding to partially stabilized zirconia (a mixture of tetragonal ZrO/sub 2/ and cubic solid solution). Microstructural characteristics and crystalline phase composition of as-deposited and heat treated films (1100/sup 0/C and 1500/sup 0/C) were determined by transmission electron microscopy (TEM) and by x-ray diffraction (XRD). Effects of substrate bias (0 approx. 250 volts), which induced ion bombardment of the film during growth, were also studied. The as-deposited ZrO/sub 2/-Y/sub 2/O/sub 3/ films were single phase over the composition range studied, and XRD data indicated considerable local atomic disorder in the lattice. Films produced at low bias contained intergranular voids, pronounced columnar growth, and porosity between columns. At high bias, the microstructure was denser, and films contained high compressive stress. After heat treatment, all deposits remained single phase, therefore a microstructure and precipitate distribution characteristic of toughened, partially stabilized zirconia appear to be difficult to achieve in vapor deposited zirconia coatings.

• Research Organization: Pacific Northwest Lab., Richland, WA (USA)
• DOE Contract Number: AC06-76RL01830
• OSTI ID: 5487840
• Report Number(s): PNL-SA-11504; CONF-831174-19; ON: DE84003352
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
CHALCOGENIDES
COATINGS
COHERENT SCATTERING
CRYSTAL STRUCTURE
DIFFRACTION
FILMS
HEAT TREATMENTS
MICROSTRUCTURE
OXIDES
OXYGEN COMPOUNDS
SCATTERING
SPUTTERING
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES