Structural and optical properties of electron beam evaporated yttria stabilized zirconia thin films

Journal Article · Wed Jun 24 04:00:00 EDT 2015 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4917956· OSTI ID:22490417

Kirubaharan, A. Kamalan; Dharini, T.; Ramachandran, D. ^[1]; Singh, Akash; Mohandas, E. ^[2]

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1. Centre for Nanoscience and Nanotechnology, Sathyabama University, Chennai-600119 (India)
2. Physical Metallurgy Group, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102 (India)

Yttria stabilized zirconia (10 mole % Y{sub 2}O{sub 3}) thin films were deposited on quartz substrates using electron beam physical vapor deposition at the substrate temperatures in the range 300 – 973 K. XRD analysis showed cubic crystalline phase of YSZ films with preferred orientation along (111). The surface roughness was found to increase with the increase of deposition temperatures. The optical band gap of ∼5.7 eV was calculated from transmittance curves. The variation in the optical properties is correlated with the changes in the microstructural features of the films prepared as a function of substrate temperature.

• OSTI ID: 22490417
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1665; ISSN 0094-243X; ISSN APCPCS
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CRYSTAL STRUCTURE
CUBIC LATTICES
ELECTRON BEAMS
EV RANGE
GRAIN ORIENTATION
OPTICAL PROPERTIES
PHYSICAL VAPOR DEPOSITION
QUARTZ
ROUGHNESS
SUBSTRATES
SURFACES
THIN FILMS
X-RAY DIFFRACTION
YTTRIUM OXIDES
ZIRCONIUM OXIDES