Improvement of optical ZrO/sub 2/ deposited film's properties
Technical Report
·
OSTI ID:6805612
Vacuum-evaporated ZrO/sub 2/ films which are widely used for optical multilayer coatings have a disadvantage regarding to the application to multilayer antireflection coatings. This disadvantage is due to optical inhomogeneity of the films whose refractive index decreases with increasing thickness. For the improvement of their optical properties, the effects of TiO/sub 2/ and Y/sub 2/O/sub 3/ additions to evaporants of ZrO/sub 2/ on optical homogeneities and the crystal structures of the deposited films were investigated by electron-beam evaporations. The deposited films of TiO/sub 2/ additions were optically almost homogeneous and the film's structure was amorphous. The ones of Y/sub 2/O/sub 3/ additions showed fairly lowered optical inhomogeneities and stabilized cubic crystal structures. The most favorable ZrO/sub 2/ films for multilayer coatings were obtained by suitable additions of both TiO/sub 2/ and Y/sub 2/O/sub 3/, which had good optical homogeneities, adequate and variable refractive indices, enhanced harnesses and reliable reproducibilities of properties.
- Research Organization:
- Government Industrial Research Inst., Osaka, Ikeda (Japan)
- OSTI ID:
- 6805612
- Report Number(s):
- PB-87-151171/XAB
- Country of Publication:
- United States
- Language:
- English
Similar Records
Cubic zirconia as a high-quality facet coating for semiconductor lasers
YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} films on off-axis Y--ZrO{sub 2} substrates using Y--ZrO{sub 2} or Y{sub 2}O{sub 3} barrier layers
On the optical, structural, and morphological properties of ZrO{sub 2} and TiO{sub 2} dip-coated thin films supported on glass substrates
Journal Article
·
Mon Aug 01 00:00:00 EDT 1988
· J. Appl. Phys.; (United States)
·
OSTI ID:7199120
YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} films on off-axis Y--ZrO{sub 2} substrates using Y--ZrO{sub 2} or Y{sub 2}O{sub 3} barrier layers
Journal Article
·
Fri Mar 31 23:00:00 EST 1995
· Journal of Materials Research
·
OSTI ID:44509
On the optical, structural, and morphological properties of ZrO{sub 2} and TiO{sub 2} dip-coated thin films supported on glass substrates
Journal Article
·
Mon Nov 14 23:00:00 EST 2005
· Materials Characterization
·
OSTI ID:20833169
Related Subjects
36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ADDITIVES
AMORPHOUS STATE
CHALCOGENIDES
DEPOSITION
ENERGY BEAM DEPOSITION
FILMS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SURFACE COATING
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ADDITIVES
AMORPHOUS STATE
CHALCOGENIDES
DEPOSITION
ENERGY BEAM DEPOSITION
FILMS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SURFACE COATING
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES