Tungsten and other refractory metals for VLSI applications
Conference
·
OSTI ID:7195597
This book presents the papers given at two conferences on tungsten and other refractory metals for VLSI applications. Topics considered include the microstructural characterization of low pressure chemical vapor deposition (LPCVD) tungsten films, properties of CVD tungsten films deposited at atmospheric and reduced pressures, the adhesion of tungsten films to dielectrics, crystal doping, sputtering, electrical properties, refractory metals, tungsten-silicon interactions, mathematical models, device applications, and the future of refractory metals in VLSI applications.
- OSTI ID:
- 7195597
- Report Number(s):
- CONF-8510238-
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
ABSTRACTS
ADHESION
ALLOYS
ATMOSPHERIC PRESSURE
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CIRCUIT THEORY
CRYSTAL DOPING
CRYSTAL STRUCTURE
DEPOSITION
DIELECTRIC MATERIALS
DOCUMENT TYPES
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
FABRICATION
FILMS
FORECASTING
INTEGRATED CIRCUITS
LEADING ABSTRACT
MATERIALS
MATHEMATICAL MODELS
MEETINGS
METALS
MICROELECTRONIC CIRCUITS
MICROSTRUCTURE
PHYSICAL PROPERTIES
PRESSURE DEPENDENCE
REFRACTORY METALS
SEMIMETALS
SILICON
SPUTTERING
SURFACE COATING
THIN FILMS
TRANSITION ELEMENTS
TUNGSTEN
360101* -- Metals & Alloys-- Preparation & Fabrication
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
ABSTRACTS
ADHESION
ALLOYS
ATMOSPHERIC PRESSURE
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CIRCUIT THEORY
CRYSTAL DOPING
CRYSTAL STRUCTURE
DEPOSITION
DIELECTRIC MATERIALS
DOCUMENT TYPES
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
FABRICATION
FILMS
FORECASTING
INTEGRATED CIRCUITS
LEADING ABSTRACT
MATERIALS
MATHEMATICAL MODELS
MEETINGS
METALS
MICROELECTRONIC CIRCUITS
MICROSTRUCTURE
PHYSICAL PROPERTIES
PRESSURE DEPENDENCE
REFRACTORY METALS
SEMIMETALS
SILICON
SPUTTERING
SURFACE COATING
THIN FILMS
TRANSITION ELEMENTS
TUNGSTEN