1988 proceedings of the fifth international IEEE VLSI multilevel interconnection conference
Conference
·
OSTI ID:6160942
These proceedings collect papers given at a conference on Very Large Scale Integration (VLSI). Topics include: dielectric planarization, semiconductor junctions, metal-on-silicon (MOS) transistors, sputtering, ion etching, tungsten vapor deposition, vapor deposited coatings.
- OSTI ID:
- 6160942
- Report Number(s):
- CONF-8806180-
- Country of Publication:
- United States
- Language:
- English
Similar Records
Tungsten and other refractory metals for VLSI applications
Proceedings of the IEEE international conference on computer design: VLSI in computers
Tungsten and other refractory metals for VLSI applications II
Conference
·
Tue Dec 31 23:00:00 EST 1985
·
OSTI ID:7195597
Proceedings of the IEEE international conference on computer design: VLSI in computers
Conference
·
Tue Dec 31 23:00:00 EST 1985
·
OSTI ID:6574517
Tungsten and other refractory metals for VLSI applications II
Conference
·
Wed Dec 31 23:00:00 EST 1986
·
OSTI ID:7167774
Related Subjects
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
42 ENGINEERING
420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)
ABSTRACTS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
DEPOSITION
DIELECTRIC MATERIALS
DOCUMENT TYPES
ELECTRONIC CIRCUITS
ELEMENTS
ETCHING
FABRICATION
INTEGRATED CIRCUITS
JUNCTIONS
LEADING ABSTRACT
MATERIALS
METALS
MICROELECTRONIC CIRCUITS
MOS TRANSISTORS
REVIEWS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR JUNCTIONS
SPUTTERING
SURFACE COATING
SURFACE FINISHING
TRANSISTORS
TRANSITION ELEMENTS
TUNGSTEN
VAPOR DEPOSITED COATINGS
360601 -- Other Materials-- Preparation & Manufacture
42 ENGINEERING
420800* -- Engineering-- Electronic Circuits & Devices-- (-1989)
ABSTRACTS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
DEPOSITION
DIELECTRIC MATERIALS
DOCUMENT TYPES
ELECTRONIC CIRCUITS
ELEMENTS
ETCHING
FABRICATION
INTEGRATED CIRCUITS
JUNCTIONS
LEADING ABSTRACT
MATERIALS
METALS
MICROELECTRONIC CIRCUITS
MOS TRANSISTORS
REVIEWS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR JUNCTIONS
SPUTTERING
SURFACE COATING
SURFACE FINISHING
TRANSISTORS
TRANSITION ELEMENTS
TUNGSTEN
VAPOR DEPOSITED COATINGS