Wet chemical etching of high-temperature superconducting Y-Ba-Cu-O films in ethylenediaminetetraacetic acid
- Bellcore, 331 Newman Springs Road, Red Bank, New Jersey 07701 (US)
A new wet chemical etchant for high-temperature superconducting films is reported, which leaves transition temperature unaffected within experimental accuracy (1 K) and does not require reoxygenation. The solution consists of ethylenediaminetetraacetic acid (EDTA) in water, and is suitable for micropatterning using standard photolithography. We have fabricated 3--50 {mu}m patterns on laser-deposited Y-Ba-Cu-O films. The bulk of the films etches at 0.14 {mu}m/min in a saturated solution at room temperature. Porous surface layers are removed three times faster than the dense portions of the films. Etch rate depends linearly on the solution concentration and exponentially on the solution temperature. These rates are reduced if etching is interrupted and the samples are exposed to atmosphere.
- OSTI ID:
- 7167992
- Journal Information:
- Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 55:25; ISSN APPLA; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
Chemical plasma etching of Y-Ba-Cu-oxide thin films
Reactive ion beam etching of Y-Ba-Cu-O superconductors
Related Subjects
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ACETIC ACID
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CARBOXYLIC ACIDS
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ETCHING
FILMS
LAYERS
MONOCARBOXYLIC ACIDS
ORGANIC ACIDS
ORGANIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
SUPERCONDUCTING FILMS
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES