In situ scanning tunneling microscopy of copper deposition with benzotriazole

Journal Article · Thu Aug 01 00:00:00 EDT 1991 · Journal of the Electrochemical Society; (United States)

DOI:https://doi.org/10.1149/1.2085965· OSTI ID:7164192

Armstrong, M J; Muller, R H ^[1]

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1. Lawrence Berkeley Lab., Dept. of Chemical Engineering, Univ. of California at Berkeley, Berkeley, CA (US)

In this paper, the submicron topography of Cu deposits is studied with scanning tunneling microscopy to investigate the effect of benzotriazole in the initial stages of deposition. The presence of benzotriazole results in a marked increase in over-potential for the deposition. It is found to eliminate the preferential growth of specific crystallographic planes and the formation of crystal facets. The number density of nuclei, determined from Fourier transforms of the surface profiles of 7 nm thick films, is found to increase with increasing overpotential of the deposition but is independent of the presence of the inhibitor.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 7164192
• Journal Information: Journal of the Electrochemical Society; (United States), Journal Name: Journal of the Electrochemical Society; (United States) Vol. 138:8; ISSN JESOA; ISSN 0013-4651
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure & Phase Studies
664200 -- Spectra of Atoms & Molecules & their Interactions with Photons-- (1992-)
665300 -- Interactions Between Beams & Condensed Matter-- (1992-)
74 ATOMIC AND MOLECULAR PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AZOLES
BENZOTHIAZOLES
COPPER
CRYSTAL STRUCTURE
CRYSTALLOGRAPHY
ELEMENTS
FABRICATION
FILMS
FOURIER TRANSFORMATION
HETEROCYCLIC COMPOUNDS
INFRARED SPECTRA
INTEGRAL TRANSFORMATIONS
METALS
MICROSTRUCTURE
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
ORGANIC SULFUR COMPOUNDS
SPECTRA
SURFACE PROPERTIES
THIAZOLES
THIN FILMS
TRANSFORMATIONS
TRANSITION ELEMENTS