Nucleation of copper films on platinum: Effect of benzotriazole
- Lawrence Berkeley Lab., CA (USA) California Univ., Berkeley, CA (USA). Dept. of Chemical Engineering
The sub-micron topography of Cu deposits during the initial stages of deposition was studied with scanning tunneling microscopy (STM) to investigate the effect of benzotriazole (BTA). The brightness of a surface, characterized by a low intensity of scattered light, has been related to its topography. Additives such as benzotriazole are used in plating baths to reduce the roughness. The average particle size in a deposit can be determined by dividing the deposition rate by the nucleation rate. In this study the number density of nuclei of Cu on Pt was derived from Fourier transforms of the STM data from 54 {angstrom} thick Cu films. The effects of BTA concentration and overpotential on the Cu number density of nuclei were determined. 2 refs., 4 figs.
- Research Organization:
- Lawrence Berkeley Lab., CA (USA)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 6717344
- Report Number(s):
- LBL-28954; CONF-901073--5; ON: DE90014035
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360101* -- Metals & Alloys-- Preparation & Fabrication
AZOLES
COATINGS
COPPER
DEPOSITION
ELECTRON MICROSCOPY
ELEMENTS
FILMS
HETEROCYCLIC COMPOUNDS
METALS
MICROSCOPY
NUCLEATION
ORGANIC COMPOUNDS
ORGANIC NITROGEN COMPOUNDS
PLATINUM
PLATINUM METALS
ROUGHNESS
SURFACE PROPERTIES
THIN FILMS
TOPOGRAPHY
TRANSITION ELEMENTS
TRIAZOLES