Surface topography and nucleation of chemical vapor deposition diamond films on silicon by scanning tunneling microscopy

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.585494· OSTI ID:5228702

Turner, K F; LeGrice, Y M; Stoner, B R; Glass, J T; Nemanich, R J ^[1]

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1. North Carolina State Univ., Raleigh (United States)

This paper reports on the surface topography of diamond thin films deposited on silicon charted by scanning tunneling microscopy (STM). This study addresses the initial nucleation of diamond growth on Si, and the faceted structure of the diamond films. The results were obtained from an in-air STM system with tunneling currents between 0.2 and 3 nA. For studies of the diamond nucleation, samples were prepared by timed growth up to 60 min in a microwave plasma chemical vapor deposition (CVD) system. Diamond films with thicknesses in the 1-2 {mu}m range were prepared by hot-filament CVD and examined by STM to determine the morphology of the diamond growth surface. The presence of diamond was verified by Raman spectroscopy. The STM images show that the surface is uniformly affected in the first 30 min of growth and diamond nuclei are identified after 60 min of growth. The thick films showed topography with facets on the surface similar to those seen from scanning electron microscopy results. The surface of these facets have been examined as well as the area between the facets. Elongated ridge structures are observed between different facets on the surface.

• OSTI ID: 5228702
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:2; ISSN 0734-211X; ISSN JVTBD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
360602 -- Other Materials-- Structure & Phase Studies
CARBON
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
CRYSTAL GROWTH
DEPOSITION
DIAMONDS
ELEMENTAL MINERALS
ELEMENTS
FILMS
MATHEMATICS
MICROSCOPY
MINERALS
MORPHOLOGY
NONMETALS
NUCLEATION
SEMIMETALS
SILICON
SUBSTRATES
SURFACE COATING
THIN FILMS
TOPOLOGY
TUNNEL EFFECT
VAPOR DEPOSITED COATINGS