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U.S. Department of Energy
Office of Scientific and Technical Information

Optimization of parameters affecting LSM performance as diffractors of soft x rays. Progress report, 1 April 1985-30 November 1985

Technical Report ·
OSTI ID:7152901
Progress has been made in designing multilayers optimal for the reflection of soft x rays. The effects of roughness and interfacial diffusion have been incorporated into the codes used for predicting reflectivity, and the roughness of several substrates and multilayers has been measured. Fabrication systems have been upgraded, and a robust multilayer composed of tantalum and carbon has been produced. Its reflectivity (to the fifth order of diffraction) has been measured at 1.5 A.
Research Organization:
Brigham Young Univ., Provo, UT (USA)
DOE Contract Number:
AS08-84DP40199
OSTI ID:
7152901
Report Number(s):
DOE/DP/40199-2; ON: DE87001927
Country of Publication:
United States
Language:
English