Demonstration of ultra high resolution soft x-ray tomography
- University of California, Lawrence Livermore National Laboratory, California 94551 (United States)
- Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
- Lawrence Berkeley Laboratory, Berkeley, California 94720 (United States)
Ultra high resolution three dimensional images of a microscopic test object were made with soft x-rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows which were separated by {similar_to} 5{mu}m. Depth resolution comparable to the transverse resolution was achieved by recording nine 2-D images of the object at angles between {minus}50 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image using an algebraic reconstruction technique (ART) algorithm. We observed a transverse resolution of {similar_to}1000 A. Artifacts in the reconstruction limited the overall depth resolution to {similar_to}6000 A, however some features were clearly reconstructed with a depth resolution of {similar_to}1000 A. {copyright} {ital 1994} {ital American} {ital Institute} {ital of} {ital Physics}.
- Research Organization:
- Lawrence Livermore National Laboratory
- DOE Contract Number:
- W-7405-ENG-48; W-31109-ENG-38; AC03-76SF00098
- OSTI ID:
- 71477
- Report Number(s):
- CONF-940592--
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 332; ISSN APCPCS; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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