Ultrahigh-resolution X-ray tomography

Journal Article · Thu Nov 17 23:00:00 EST 1994 · Science

DOI:https://doi.org/10.1126/science.266.5188.1213· OSTI ID:70323

Haddad, W S; Trebes, J E; Levesque, R A ^[1]; McNulty, I; Yang, L ^[2]; Anderson, E H ^[3]

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1. Lawrence Livermore National Lab., CA (United States)
2. Argonne National Lab., IL (United States)
3. Lawrence Berkeley Lab., CA (United States)

Ultrahigh-resolution three-dimensional images of a microscopic test object were made with soft x-rays collected with a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by {approximately} 5 micrometers. Depth resolution comparable to the transverse resolution was achieved by recording nine two-dimensional images of the object at angles between -50 and +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a three-dimensional image by means of an algorithm using an algebraic reconstruction technique. A transverse resolution of {approximately} 1000 angstroms was observed. Artifacts in the reconstruction limited the overall depth resolution to {approximately} 6000 angstroms; however, some features were clearly reconstructed with a depth resolution of {approximately} 1000 angstroms. 20 refs., 4 figs.

• DOE Contract Number: W-7405-ENG-48; W-31109-ENG-38; AC03-76SF00098; FG02-89ER60858
• OSTI ID: 70323
• Journal Information: Science, Journal Name: Science Journal Issue: 5188 Vol. 266; ISSN SCIEAS; ISSN 0036-8075
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
IMAGES
MICROSCOPES
RESOLUTION
TOMOGRAPHY