Demonstration of ultra high resolution soft x-ray tomography

Journal Article · Mon May 01 00:00:00 EDT 1995 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.47990· OSTI ID:21153905

Haddad, W S; McNulty, I; Trebes, J E; Anderson, E H; Yang, L; Brase, J M ^[1]

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1. University of California, Lawrence Livermore National Laboratory, CA 94551 (United States)

Ultra high resolution three dimensional images of a microscopic test object were made with soft x-rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows which were separated by {approx} 5{mu}m. Depth resolution comparable to the transverse resolution was achieved by recording nine 2-D images of the object at angles between -50 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image using an algebraic reconstruction technique (ART) algorithm. We observed a transverse resolution of {approx}1000 A. Artifacts in the reconstruction limited the overall depth resolution to {approx}6000 A, however some features were clearly reconstructed with a depth resolution of {approx}1000 A.

• OSTI ID: 21153905
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 332; ISSN 0094-243X; ISSN APCPCS
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ALGORITHMS
DEPTH
GOLD
IMAGE PROCESSING
IMAGES
RESOLUTION
SCANNING TUNNELING MICROSCOPY
SILICON NITRIDES
SOFT X RADIATION
TOMOGRAPHY