Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Ultra high resolution soft x-ray tomography

Conference ·
OSTI ID:110678

Ultra high resolution three dimensional images of a microscopic test object were made with soft x-rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by {approximately}5{mu}m. A series of nine 2-D images of the object were recorded at angles between {minus}50 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image by means of an algebraic reconstruction technique (ART) algorithm. A transverse resolution of {approximately}1000 {Angstrom} was observed. Artifacts in the reconstruction limited the overall depth resolution to {approximately}6000 {Angstrom}, however some features were clearly reconstructed with a depth resolution of {approximately}1000 {Angstrom}. A specially modified ART algorithm and a constrained conjugate gradient (CCG) code were also developed as improvements over the standard ART algorithm. Both of these methods made significant improvements in the overall depth resolution bringing it down to {approximately}1200 {Angstrom} overall. Preliminary projection data sets were also recorded with both dry and re-hydrated human sperm cells over a similar angular range.

Research Organization:
Lawrence Livermore National Lab., CA (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
110678
Report Number(s):
UCRL-JC--121622; CONF-950793--45; ON: DE95017871
Country of Publication:
United States
Language:
English

Similar Records

Ultra high resolution soft x-ray tomography
Conference · Sat Dec 30 23:00:00 EST 1995 · OSTI ID:220783

Demonstration of ultra high resolution soft x-ray tomography
Journal Article · Mon May 01 00:00:00 EDT 1995 · AIP Conference Proceedings · OSTI ID:21153905

Ultrahigh-resolution X-ray tomography
Journal Article · Thu Nov 17 23:00:00 EST 1994 · Science · OSTI ID:70323