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Preparation and patterning of YBaCuO thin films obtained by sequential deposition of CuO/sub x//Y/sub 2/O/sub 3//BaF/sub 2/

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.100644· OSTI ID:7145684
Superconducting thin films of YBaCuO were prepared by stacking layers of CuO/sub x/ , Y/sub 2/O/sub 3/, and BaF/sub 2/ onto substrates held at room temperature. The CuO/sub x/ layer was obtained by oxidizing in air a previously deposited metallic Cu film. After deposition of the subsequent layers, the films were annealed at 880 /sup 0/C in flowing oxygen. Samples 1 ..mu..m thick on sapphire showed an onset at T/sup onset//sub c/ = 85 K and zero resistance at T/sup 0//sub c/ = 70 K; on yttria-stabilized zirconia (YSZ), T/sup onset//sub c/ = 90 K and T/sup 0//sub c/ = 80 K. Patterned films are easily obtained by applying conventional photolithographic methods to the Cu film.
Research Organization:
School of Physics and Astronomy, Sackler Faculty of Exact Sciences, Tel Aviv University, 69978 Ramat Aviv, Israel
OSTI ID:
7145684
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:8; ISSN APPLA
Country of Publication:
United States
Language:
English

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