Sequential Ar-O sub 2 sputtering of Y sub 2 O sub 3 , BaF sub 2 , and CuO targets for preparation of Y-Ba-Cu-O superconducting films without wet-O sub 2 annealing

Journal Article · Mon Dec 04 04:00:00 EST 1989 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.102294· OSTI ID:5148145

Bhushan, M; Strauss, A J; Finn, M C ^[1]

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1. Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173-9108 (US)

Superconducting Y-Ba-Cu-O (YBCO) films have been prepared by {ital ex situ} O{sub 2} annealing of multilayer films deposited on yttria-stabilized zirconia substrates by sequential rf diode sputtering of Y{sub 2}O{sub 3}, BaF{sub 2}, and CuO targets, all of which are chemically stable. If sputtering is performed in an Ar ambient, the as-deposited films contain sufficient F to require its removal by annealing in wet O{sub 2} at about 800 {degree}C or above before the superconducting YBCO phase can be formed by annealing in dry O{sub 2}. However, sputtering in an Ar-O{sub 2} ambient greatly reduces the F content, making it possible to obtain the superconducting phase by annealing in dry O{sub 2} only. If the ambient contains about 20% O{sub 2}, films with {ital T}{sub {ital c}} ({ital R}=0){gt}85 K can be prepared without wet-O{sub 2} annealing. The Ar-O{sub 2} process therefore has the potential for {ital in} {ital situ} preparation of superconducting YBCO films.

• OSTI ID: 5148145
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 55:23; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

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Cermets
& Refractories-- Preparation & Fabrication
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Cermets
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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM FLUORIDES
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DATA
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
INFORMATION
LOW TEMPERATURE
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PEROVSKITES
PHYSICAL PROPERTIES
SPUTTERING
STABILITY
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THICKNESS
TRANSITION ELEMENT COMPOUNDS
VERY HIGH TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES