Sequential Ar-O sub 2 sputtering of Y sub 2 O sub 3 , BaF sub 2 , and CuO targets for preparation of Y-Ba-Cu-O superconducting films without wet-O sub 2 annealing

Journal Article · Mon Dec 04 00:00:00 EST 1989 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.102294· OSTI ID:5148145

Bhushan, M; Strauss, A J; Finn, M C ^[1]

---

1. Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173-9108 (US)

Superconducting Y-Ba-Cu-O (YBCO) films have been prepared by {ital ex situ} O{sub 2} annealing of multilayer films deposited on yttria-stabilized zirconia substrates by sequential rf diode sputtering of Y{sub 2}O{sub 3}, BaF{sub 2}, and CuO targets, all of which are chemically stable. If sputtering is performed in an Ar ambient, the as-deposited films contain sufficient F to require its removal by annealing in wet O{sub 2} at about 800 {degree}C or above before the superconducting YBCO phase can be formed by annealing in dry O{sub 2}. However, sputtering in an Ar-O{sub 2} ambient greatly reduces the F content, making it possible to obtain the superconducting phase by annealing in dry O{sub 2} only. If the ambient contains about 20% O{sub 2}, films with {ital T}{sub {ital c}} ({ital R}=0){gt}85 K can be prepared without wet-O{sub 2} annealing. The Ar-O{sub 2} process therefore has the potential for {ital in} {ital situ} preparation of superconducting YBCO films.

• OSTI ID: 5148145
• Journal Information: Applied Physics Letters; (USA), Vol. 55:23; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM FLUORIDES
SPUTTERING
BARIUM OXIDES
SUPERCONDUCTIVITY
COPPER OXIDES
SUPERCONDUCTING FILMS
FABRICATION
YTTRIUM OXIDES
ANNEALING
EXPERIMENTAL DATA
LOW TEMPERATURE
OXYGEN
PEROVSKITES
STABILITY
THICKNESS
VERY HIGH TEMPERATURE
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
DATA
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
HEAT TREATMENTS
INFORMATION
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)