Effect of sputtering current on the growth of Y-Ba-Cu-O films
Journal Article
·
· Applied Physics Letters; (USA)
- Materials Research Laboratories, Industrial Technology Research Institute, Chutung, Hsinchu 31015, Taiwan, Republic of China (TW)
Y-Ba-Cu-O (YBCO) films were grown on (100)MgO and (100)Si substrates by the high-pressure dc diode sputtering process. The target was a Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub {ital x}} compound, made by a solid-state reaction. The sputtering gas was Ar-50% O{sub 2} and the total pressure was 1.5 Torr. As-deposited superconducting YBCO films can be prepared at low substrate temperatures (420 {degree}C) with a high discharge current. The phases of the as-deposited films strongly relate to the discharge current and substrate temperature. The high concentration of active species (excited atoms and ions) in the plasma during deposition is the main factor that permits superconducting YBCO films to be formed at such low substrate temperatures.
- OSTI ID:
- 6815792
- Journal Information:
- Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 56:24; ISSN APPLA; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
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Epitaxial Y-Ba-Cu-O thin films on MgO deposited by high-pressure reactive magnetron sputtering
Sequential Ar-O(2) sputtering of Y(2)O(3), BaF(2), and CuO targets for preparation of Y-Ba-Cu-O superconducting films without wet-O(2) annealing
Journal Article
·
Mon Aug 01 00:00:00 EDT 1988
· J. Appl. Phys.; (United States)
·
OSTI ID:7161158
Epitaxial Y-Ba-Cu-O thin films on MgO deposited by high-pressure reactive magnetron sputtering
Journal Article
·
Sun Oct 01 00:00:00 EDT 1989
· Journal of Applied Physics; (USA)
·
OSTI ID:5574815
Sequential Ar-O(2) sputtering of Y(2)O(3), BaF(2), and CuO targets for preparation of Y-Ba-Cu-O superconducting films without wet-O(2) annealing
Technical Report
·
Sun Dec 03 23:00:00 EST 1989
·
OSTI ID:6965178
Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CURRENTS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
FILMS
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
SUBSTRATES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CURRENTS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
FILMS
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
SUBSTRATES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES