Sequential Ar-O(2) sputtering of Y(2)O(3), BaF(2), and CuO targets for preparation of Y-Ba-Cu-O superconducting films without wet-O(2) annealing

Technical Report · Mon Dec 04 04:00:00 EST 1989

OSTI ID:6965178

Bhushan, M; Strauss, A J; Finn, M C

Superconducting Y-Ba-Cu-O (YBCO) films have been prepared by ex situ O{sub 2} annealing of multilayer films deposited on yttria-stabilized zirconia substrates by sequential rf diode sputtering of Y{sub 2}O{sub 3}, BaF2, and CuO targets, all of which are chemically stable. If sputtering is performed in an Ar ambient, the as-deposited films contain sufficient F to require its removal by annealing in wet O{sub 2} at about 800 C or above before the superconducting YBCO phase can be formed by annealing in dry O{sub 2}. However, sputtering in an Ar-O{sub 2} ambient greatly reduces the F content, making it possible to obtain the superconducting phase by annealing in dry O{sub 2} only. If the ambient contains about 20% O{sub 2}, films with Tc (R = 0) > 85 K can be prepared without wet-O{sub 2} annealing. The Ar-O{sub 2} process therefore has the potential for in situ preparation of superconducting YBCO films.

• Research Organization: Massachusetts Inst. of Tech., Lexington, MA (USA). Lincoln Lab.
• OSTI ID: 6965178
• Report Number(s): AD-A-217508/1/XAB; JA--6363
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
ARGON
ATMOSPHERES
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CONTROLLED ATMOSPHERES
COPPER COMPOUNDS
COPPER OXIDES
ELEMENTS
FABRICATION
FILMS
FLUIDS
GASES
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
LAYERS
NONMETALS
OXIDES
OXYGEN COMPOUNDS
RARE GASES
REMOVAL
RF SYSTEMS
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES