Laser annealed boron implanted silicon solar cells

Conference · Thu Sep 01 04:00:00 EDT 1977

OSTI ID:7085486

Young, R T; White, C W; Clark, G J; Narayan, J; Westbrook, R D

The use of high power laser pulses is being explored as a technique for annealing radiation damage in ion implanted silicon prior to the fabrication of solar cells. Extensive studies have been carried out to compare laser and conventional thermal annealing characteristics using /sup 11/B/sup +/ (35 keV) implanted silicon (100) crystals. Our results show that laser annealing can completely restore electrical activity in the implanted layer with little or no degradation of the minority carrier lifetime in the substrate. Moreover, the residual disorder in the implanted layer is drastically reduced in comparison to that observed after conventional thermal annealing. Solar cells have been fabricated using /sup 11/B/sup +/ (35 keV) implanted, laser annealed, 80 ..cap omega..-cm (100) Si. A substantial improvement in cell parameters is observed in laser annealed cells compared to similar cells fabricated using conventional thermal annealing. Results are presented to compare laser and thermally annealed ion implanted cells, and to compare these to cells fabricated using standard diffusion techniques. Possible reasons for the improvement in the laser annealed cells compared to the thermally annealed ion implanted cells are discussed.

• Research Organization: Oak Ridge National Lab., Tenn. (USA)
• DOE Contract Number: W-7405-ENG-26
• OSTI ID: 7085486
• Report Number(s): CONF-770922-2
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
ANNEALING
ATOMIC IONS
BORON IONS
CHARGED PARTICLES
DIRECT ENERGY CONVERTERS
ELECTROMAGNETIC RADIATION
ELEMENTS
FABRICATION
HEAT TREATMENTS
ION IMPLANTATION
IONS
LASER RADIATION
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
RADIATIONS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS