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High reliability sputtered Schottky diodes on GaAs

Journal Article · · International Journal of Infrared and Millimeter Waves; (United States)
DOI:https://doi.org/10.1007/BF01041880· OSTI ID:7068790
The authors describe developments to improve reliability and power handling for high frequency applications in whisker-contacted Schottky barrier diode mixers, detectors and multipliers fabricated using sputtered refractor metals and silicides. The lift-off process has been used to fabricate diodes on GaAs with ideality factors of 1.18 and 1.06 for W/GaAs and TiSi{sub x}/GaAs contacts respectively. Different processing steps are shown. Electrical properties of TiSi{sub x} and W thin films sputtered on GaAs were investigated.
OSTI ID:
7068790
Journal Information:
International Journal of Infrared and Millimeter Waves; (United States), Journal Name: International Journal of Infrared and Millimeter Waves; (United States) Vol. 12:1; ISSN 0195-9271; ISSN IJIWD
Country of Publication:
United States
Language:
English