High reliability sputtered Schottky diodes on GaAs
Journal Article
·
· International Journal of Infrared and Millimeter Waves; (United States)
- University Coll., Cork (Ireland)
The authors describe developments to improve reliability and power handling for high frequency applications in whisker-contacted Schottky barrier diode mixers, detectors and multipliers fabricated using sputtered refractor metals and silicides. The lift-off process has been used to fabricate diodes on GaAs with ideality factors of 1.18 and 1.06 for W/GaAs and TiSi{sub x}/GaAs contacts respectively. Different processing steps are shown. Electrical properties of TiSi{sub x} and W thin films sputtered on GaAs were investigated.
- OSTI ID:
- 7068790
- Journal Information:
- International Journal of Infrared and Millimeter Waves; (United States), Journal Name: International Journal of Infrared and Millimeter Waves; (United States) Vol. 12:1; ISSN 0195-9271; ISSN IJIWD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
426000* -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
ARSENIC COMPOUNDS
ARSENIDES
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
FABRICATION
FIELD EFFECT TRANSISTORS
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
INTEGRATED CIRCUITS
MEASURING INSTRUMENTS
METALS
MICROELECTRONIC CIRCUITS
PHYSICAL PROPERTIES
PNICTIDES
RADIATION DETECTORS
RELIABILITY
SCHOTTKY BARRIER DIODES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SILICIDES
SILICON COMPOUNDS
SPUTTERING
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM SILICIDES
TRANSISTORS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TUNGSTEN
USES
426000* -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
ARSENIC COMPOUNDS
ARSENIDES
ELECTRICAL PROPERTIES
ELECTRONIC CIRCUITS
ELEMENTS
FABRICATION
FIELD EFFECT TRANSISTORS
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
INTEGRATED CIRCUITS
MEASURING INSTRUMENTS
METALS
MICROELECTRONIC CIRCUITS
PHYSICAL PROPERTIES
PNICTIDES
RADIATION DETECTORS
RELIABILITY
SCHOTTKY BARRIER DIODES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SILICIDES
SILICON COMPOUNDS
SPUTTERING
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM SILICIDES
TRANSISTORS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TUNGSTEN
USES