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Phase stability versus the lattice mismatch of (100)Co sub 1-x Ga sub x thin films on (100)GaAs

Conference · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)
OSTI ID:7047877
; ; ; ;  [1]
  1. Univ. of California, Los Angeles (United States)
Thin films of the intermetallic compound Co{sub 1-x}Ga{sub x}, which has a broad homogeneity range and a continuously variable lattice constant, were grown on the (100)GaAs surface by molecular beam epitaxy. The stoichiometry of the films and the cleanliness of the substrates were determined in situ by Auger electron spectroscopy. The identity and orientation of the phases present in the films were determined ex situ by x-ray diffraction (XRD). The films were annealed to various temperatures in N{sub 2} and reexamined by XRD to detect any chemical interactions between the Co{sub 1-x}Ga{sub x} and GaAs. Films of Co{sub 1-x}Ga{sub x} deposited with a 2% lattice mismatch (x = 0.5) reacted with the substrate to produce CoGa{sub 3} at 600C, whereas films with no detectable mismatch (x = 0.61) did not react until they had been heated to 800C.
OSTI ID:
7047877
Report Number(s):
CONF-910115--
Conference Information:
Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Journal Volume: 9:4
Country of Publication:
United States
Language:
English