Superconductive tunneling into NbN deposited near room temperature

Journal Article · Fri Oct 15 04:00:00 EDT 1982 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.93670· OSTI ID:7045026

van Dover, R B; Bacon, D D; Sinclair, W R

We have developed the ability to deposit niobium nitride thin films routinely having a superconducting transition temperature of 14 K by dc reactive magnetron sputtering onto substrates held near room temperature (T/sub s/ <90 /sup 0/C). This allows the use of conventional photoresist liftoff techniques for patterning. Pb-counterelectrode tunnel junctions formed on these films show excellent V-I characteristics, suitable for device applications and offering potential advantages over conventional Pb-alloy/Pb-alloy and Nb/Pb-alloy junctions. These high quality junctions are also suitable for tunneling investigations of superconductivity in the Nb-N system.

• Research Organization: Bell Laboratories, Murray Hill, New Jersey 07974
• OSTI ID: 7045026
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 41:8; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
&amp; Refractories-- Physical Properties
656102 -- Solid State Physics-- Superconductivity-- Acoustic
Electronic
Magnetic
Optical
&amp; Thermal Phenomena-- (-1987)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL REACTIONS
CURRENTS
DATA
DEPOSITION
DIMENSIONS
DIRECT CURRENT
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTRODES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
EXPERIMENTAL DATA
FILMS
INFORMATION
JUNCTIONS
MAGNETRONS
MEDIUM TEMPERATURE
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
NUMERICAL DATA
PHYSICAL PROPERTIES
PNICTIDES
SPUTTERING
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THICKNESS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
TUNNEL EFFECT
VERY LOW TEMPERATURE