Reactive sputtered copper indium diselenide films for photovoltaic applications
Single phase chalcopyrite CuInSe/sub 2/ coatings have been deposited by reactive cosputtering from Cu and In planar magnetron sources operated in an Ar+H/sub 2/Se working gas. Effective sputtering yields from the conditioned Cu and In targets were approximately 0.7 and 0.5 atoms/unit charge, respectively. Sputtering rate, H/sub 2/Se injection rate, and H/sub 2/Se and H/sub 2/ partial pressure measurements were consistent with the overall reaction Cu+In+2H/sub 2/Se..-->..CuInSe/sub 2/+2H/sub 2/. The formation of near-stoichiometric coatings appears to be aided at elevated temperatures by a reemission mechanism which removes excess In. Photovoltaic devices formed by evaporating CdS onto the sputtered CuInSe/sub 2/ yielded short circuit currents of about 33 mA/cm/sup 2/ and efficiencies of about 4%.
- Research Organization:
- Telic Company, Santa Monica, California 90404
- OSTI ID:
- 7034884
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 2:2; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
CADMIUM COMPOUNDS
CADMIUM SULFIDE SOLAR CELLS
CADMIUM SULFIDES
CHALCOGENIDES
COATINGS
COPPER
COPPER COMPOUNDS
COPPER SELENIDES
DEPOSITION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
INDIUM
INDIUM COMPOUNDS
INDIUM SELENIDES
INORGANIC PHOSPHORS
MAGNETRONS
METALS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OPACITY
OPTICAL PROPERTIES
PHOSPHORS
PHOTOELECTRIC CELLS
PHOTOELECTROMAGNETIC EFFECTS
PHOTOVOLTAIC CELLS
PHOTOVOLTAIC EFFECT
PHYSICAL PROPERTIES
SELENIDES
SELENIUM COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
SPUTTERING
SULFIDES
SULFUR COMPOUNDS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS