An investigation of reactive sputtering for depositing copper indium diselenide films for photovoltaic applications
Sputtering, particularly using magnetron methods, offers great potential for depositing films over large areas at the production volumes required for terrestrial photovoltaic applications. We have successfully deposited single phase chalcopyrite CuInSe/sub 2/ coatings by dc reactive cosputtering from Cu and In planar magnetron sources operated in an Ar+H/sub 2/Se working gas. Studies of coatings deposited with various Cu and In sputtering rates and substrate temperatures indicate that the formation of near-stoichiometric coatings is aided at elevated temperatures by a re-emission mechanism which removes excess In. Photovoltaic test devices formed by evaporating CdS onto the sputtered CuInSe/sub 2/ have yielded short circuit sputtered CuInSe/sub 2/ have yielded short circuit currents of about 33 mA/cm/sup 2/ and efficiencies of about 4%.
- Research Organization:
- Coordinated Science Laboratory and Department of Metallurgy and Mining Engineering, University of Illinois, Urbana, Illinois
- OSTI ID:
- 6026175
- Report Number(s):
- CONF-840561-
- Journal Information:
- Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States), Journal Name: Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States); ISSN CRCND
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ARGON
CADMIUM SULFIDE SOLAR CELLS
CHALCOGENIDES
CHALCOPYRITE
COPPER COMPOUNDS
COPPER SELENIDES
COPPER SULFIDES
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
FLUIDS
GASES
HYDROGEN COMPOUNDS
INDIUM COMPOUNDS
INDIUM SELENIDES
IRON COMPOUNDS
IRON SULFIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MINERALS
NONMETALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RARE GASES
SELENIDES
SELENIUM COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
SPUTTERING
STOICHIOMETRY
SUBSTRATES
SULFIDE MINERALS
SULFIDES
SULFUR COMPOUNDS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS