Secondary ion emission and sputter yields from metal targets under F/sub 2//sup +/ bombardment

Journal Article · Fri Jul 15 04:00:00 EDT 1988 · Anal. Chem.; (United States)

DOI:https://doi.org/10.1021/ac00165a012· OSTI ID:7007058

Reuter, W; Clabes, J G

Sputter yields and relative ionization probabilities have been determined after saturation bombardment of 13 elements using a mass-separated 10-keV F/sub 2//sup +/ primary beam generated in a cold cathode ion gun operated at a pressure of 5.3 Pa of pure fluorine gas. Sputter yields are larger than those obtained under O/sub 2//sup +/ bombardment and are in good agreement with those obtained from an available formalism developed to give the best fit to experimental data on sputter yields of the element under inert ion bombardment. Ionization probabilities are higher by up to a factor of 50 for those elements giving poor ion yields under O/sub 2//sup +/ bombardment. Partially fluorinated metal surfaces are formed after bombardment to steady-state ion emission conditions with a fluorine uptake of about 10-20 atom %.

• Research Organization: IBM T.J. Watson Research Center, Yorktown Heights, NY (USA)
• OSTI ID: 7007058
• Journal Information: Anal. Chem.; (United States), Journal Name: Anal. Chem.; (United States) Vol. 60:14; ISSN ANCHA
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102* -- Chemical & Spectral Procedures
CATIONS
CHARGED PARTICLES
CHEMICAL ANALYSIS
CHROMIUM
COPPER
DATA
ELEMENTS
EXPERIMENTAL DATA
FLUORINE COMPOUNDS
GERMANIUM
HALOGEN COMPOUNDS
INFORMATION
ION MICROPROBE ANALYSIS
ION SOURCES
IONS
IRIDIUM
IRON
MASS SPECTROSCOPY
METALS
MICROANALYSIS
MOLYBDENUM
NICKEL
NONDESTRUCTIVE ANALYSIS
NUMERICAL DATA
PALLADIUM
PLATINUM
PLATINUM METALS
SEMIMETALS
SILICON
SILVER
SPECTROSCOPY
SPUTTERING
TRANSITION ELEMENTS
TUNGSTEN
ZIRCONIUM