HILLOCKS ON SPUTTERED Ge SURFACES

Journal Article · Thu Aug 01 04:00:00 EDT 1963 · Journal of Applied Physics (U.S.)

DOI:https://doi.org/10.1063/1.1702771· OSTI ID:4630209

Haneman, D; Chung, M F

Evidence for the formation of hillocks on sputtered germanium surfaces was obtained by bombarding lowindex faces of single crystals with argon ions under various conditions. In all cases the argon was ionized by a hot filament gun, at pressures from 10/sup -2/ to 10/sup -3/ mm. Bombarding energies ranged from 300 to 500 ev at current densities up to 0.5 m amp/cm/sup 2/. (R.E.U.)

• Research Organization: Univ. of New South Wales, Sydney
• Sponsoring Organization: USDOE
• NSA Number: NSA-17-037745
• OSTI ID: 4630209
• Journal Information: Journal of Applied Physics (U.S.), Journal Name: Journal of Applied Physics (U.S.) Vol. Vol: 34; ISSN JAPIA
• Country of Publication: Country unknown/Code not available
• Language: English

Related Subjects

ARGON
CURRENTS
DENSITY
ENERGY RANGE
EV RANGE
GERMANIUM
HEATING
ION BEAMS
ION SOURCES
IONIZATION
IRRADIATION
LATTICES
MONOCRYSTALS
PHYSICS
PRESSURE
SPUTTERING
SURFACES
TARGETS
WIRES