Mass Analysis of Sputtered Particles
Journal Article
·
· Journal of Applied Physics
Mass analyses of sputtered particles are obtained with a mass spectrometer. Analyses of both neutrals and sputtered ions were carried out by use of a synchronous sourcedetector system. A copper target was bombarded with 2kev argon ions, and the resulting mass spectrum is shown. (R.E.U.)
- Research Organization:
- Nuclide Corp., State College, Penna.
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-17-037746
- OSTI ID:
- 4658984
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 34; ISSN 0021-8979
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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