MASS SPECTROMETRIC STUDY OF NEUTRAL PARTICLES SPUTTERED FROM Cu BY 0- TO 100-ev Ar IONS

Journal Article · Wed Apr 01 04:00:00 EST 1964 · Journal of Applied Physics (U.S.)

DOI:https://doi.org/10.1063/1.1713576· OSTI ID:4076211

Woodyard, J R; Cooper, C B

A low-pressure magnetically confined argon arc discharge was used in a mass spectrometer ion source to study low-energy (0 to 100 ev) sputtering of polycrystalline copper. Target bombarding ion current densities ranged from 60 to 200 mu A/cm/sup 2/. Neutral particles were studied. Cu atoms and Cu/sub 2/ molecules were detected. The mass ratio of analyzed Cu/sub 2/ molecules to Cu atoms increased with bombarding ion energies to about 51/2% at ion energies of 100 ev. Target voltages for appearance of Cu atoms and Cu/sub 2/ molecules were - 19 and -50 v, respectively. No Cu/sub 3/ molecules were detected; if they were present, it was estimated that the ratio /sup 189/Cu/sub 3/ to Cu/sup 63/ is less than 0.09%. The method was found to be promising for the study of neutral particles in low-energy sputtering. Yield curves agree well with results of other observers; sensitivities of 7 x 10/sup -4/ atoms/ion were attained, and this figure can be improved. (auth)

• Research Organization: Univ. of Delaware, Newark
• Sponsoring Organization: USDOE
• NSA Number: NSA-18-014610
• OSTI ID: 4076211
• Journal Information: Journal of Applied Physics (U.S.), Journal Name: Journal of Applied Physics (U.S.) Vol. Vol: 35; ISSN JAPIA
• Country of Publication: Country unknown/Code not available
• Language: English

Related Subjects

ARGON
ATOMS
CONFINEMENT
COPPER
CRYSTALS
CURRENTS
DENSITY
DETECTION
EFFICIENCY
ELECTRIC ARCS
ELECTRIC POTENTIAL
ENERGY RANGE
EV RANGE
ION BEAMS
IONS
MAGNETIC FIELDS
MASS
MASS SPECTROMETERS
MOLECULES
PHYSICS
SENSITIVITY
SPUTTERING
TARGETS