Secondary-ion emission from iron alloys under various bombarding conditions

Journal Article · Sat Jan 01 04:00:00 EST 1977 · J. Vac. Sci. Technol.; (United States)

DOI:https://doi.org/10.1116/1.569205· OSTI ID:7330005

Schroeer, J M

We present further evidence that a much simplified ''surface plasma'' or local thermal-equilibrium model can describe the secondary-ion mass spectra of Fe alloys, for bombarding energies as low as 2 keV. The probability of ionization is given by R/sup +/ proportional (B/sup +//B/sup 0/)exp(-(I/kT)), where B/sup +/ and B/sup 0/ are the partition functions of the sputtered ion and neutral atom, respectively, I is the ionization energy of the sputtered atom, and T is the ''plasma temperature.'' Agreement is approximately within a factor of two, if R/sup +/ is taken to be proportional to the sum of the secondary ions of the alloying element and its monoxide. For bombardment in UHV with 2.25-keV Ar/sup +/, T=3000 K for a clean surface, and 7000 K for a surface saturated with oxygen. For bombardment with 15-keV O/sub 2//sup +/, T=4300 K.

• Research Organization: Department of Physics, Illinois State University, Normal, Illinois 61761
• OSTI ID: 7330005
• Journal Information: J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 14:1; ISSN JVSTA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
ALUMINIUM ALLOYS
ARGON IONS
CHARGED PARTICLES
CHROMIUM ALLOYS
COBALT ALLOYS
COPPER ALLOYS
EMISSION
ENERGY RANGE
ION EMISSION
IONIZATION
IONS
IRON ALLOYS
IRON BASE ALLOYS
KEV RANGE
MANGANESE ALLOYS
MASS SPECTROSCOPY
MOLYBDENUM ALLOYS
NICKEL ALLOYS
OXYGEN IONS
SECONDARY EMISSION
SILICON ALLOYS
SPECTROSCOPY
SPUTTERING
STEELS
TITANIUM ALLOYS
VANADIUM ALLOYS
ZIRCONIUM ALLOYS