Secondary ion emission from metal targets under CF/sub 3//sup +/ and O/sub 2//sup +/ bombardment
Journal Article
·
· Anal. Chem.; (United States)
CF/sub 3//sup +/ has been extracted from a cold cathode ion gun supplied with a CF/sub 4//N/sub 2/ gas mixture. A CF/sub 3//sup +/ beam current of about 200 nA is obtained, which is about a factor of 5 smaller than the approx.1 ..mu..A O/sub 2//sup +/ beam currents obtainable from conventional oxygen ion sources. This decrease is partially offset by the higher sputter yields obtained with CF/sub 3//sup +/. Ionization probabilities are higher or equal to those found for O/sub 2//sup +/ bombardment. Composition and chemical state analyses were performed after saturation bombardment. Generally metal carbides are found to have formed with a fluorine uptake of about 10-20 atom %. The fluorine is bonded to the metal. Matrix effects are smaller under O/sub 2//sup +/ bombardment due to the low fluorine concentration.
- Research Organization:
- IBM T.J. Watson Research Center, Yorktown Heights, NY
- OSTI ID:
- 6182938
- Journal Information:
- Anal. Chem.; (United States), Journal Name: Anal. Chem.; (United States) Vol. 59:17; ISSN ANCHA
- Country of Publication:
- United States
- Language:
- English
Similar Records
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Thu Sep 15 00:00:00 EDT 2011
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Related Subjects
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101* -- Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
BEAMS
CARBON TETRAFLUORIDE
CATIONS
CHARGED PARTICLES
CHEMICAL ANALYSIS
CHROMIUM
COPPER
DATA
ELEMENTS
EXPERIMENTAL DATA
FLUORINATED ALIPHATIC HYDROCARBONS
GERMANIUM
HALOGENATED ALIPHATIC HYDROCARBONS
INFORMATION
ION MICROPROBE ANALYSIS
ION SOURCES
IONS
METALS
MICROANALYSIS
MOLECULAR BEAMS
NICKEL
NONDESTRUCTIVE ANALYSIS
NONMETALS
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXYGEN
QUANTITATIVE CHEMICAL ANALYSIS
SEMIMETALS
SILICON
SILVER
TANTALUM
TRANSITION ELEMENTS
400101* -- Activation
Nuclear Reaction
Radiometric & Radiochemical Procedures
BEAMS
CARBON TETRAFLUORIDE
CATIONS
CHARGED PARTICLES
CHEMICAL ANALYSIS
CHROMIUM
COPPER
DATA
ELEMENTS
EXPERIMENTAL DATA
FLUORINATED ALIPHATIC HYDROCARBONS
GERMANIUM
HALOGENATED ALIPHATIC HYDROCARBONS
INFORMATION
ION MICROPROBE ANALYSIS
ION SOURCES
IONS
METALS
MICROANALYSIS
MOLECULAR BEAMS
NICKEL
NONDESTRUCTIVE ANALYSIS
NONMETALS
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXYGEN
QUANTITATIVE CHEMICAL ANALYSIS
SEMIMETALS
SILICON
SILVER
TANTALUM
TRANSITION ELEMENTS