Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

High T/sub c/ YBa/sub 2/Cu/sub 3/O/sub 7/. sqrt. /sub x/ thin films on Si substrates by dc magnetron sputtering from a stoichiometric oxide target

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.99771· OSTI ID:7006853
; ; ; ; ; ;

Thin films of YBa/sub 2/Cu/sub 3/O/sub 7/..sqrt../sub x/ were deposited on Si substrates at 600--700 /sup 0/C by dc magnetron sputtering from a stoichiometric oxide target. Resistivity measurement results indicate that these films are superconducting with a zero resistance T/sub c/ as high as 76 K, without further high-temperature post-annealing treatments. These films give both core and valence-band x-ray photoemission, and x-ray diffraction spectra similar to those for superconducting films prepared with a high-temperature post-annealing step. No significant diffusion of Si from the substrate into the film was detected for the films deposited at 650 /sup 0/C or lower, according to depth profiles obtained using secondary ion mass spectrometry.

Research Organization:
IBM Almaden Research Center, San Jose, California 95120
OSTI ID:
7006853
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:26; ISSN APPLA
Country of Publication:
United States
Language:
English

Similar Records

Preparation and characterization of high T sub c YBa sub 2 Cu sub 3 O sub 7 minus x thin films on silicon by dc magnetron sputtering from a stoichiometric oxide target
Conference · Tue Jan 31 23:00:00 EST 1989 · AIP Conference Proceedings (American Institute of Physics); (USA) · OSTI ID:6948472
Sputter deposition of YBa sub 2 Cu sub 3 O sub 7 minus x films on Si at 500 degree C with conducting metallic oxide as a buffer layer
Journal Article · Mon Jul 16 00:00:00 EDT 1990 · Applied Physics Letters; (USA) · OSTI ID:7073923
C-axis oriented YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ superconducting films by metalorganic chemical vapor deposition
Journal Article · Sun Jan 22 23:00:00 EST 1989 · Appl. Phys. Lett.; (United States) · OSTI ID:6621680

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFUSION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
EMISSION
FILMS
HIGH TEMPERATURE
LOW TEMPERATURE
OXIDES
OXYGEN COMPOUNDS
PHOTOEMISSION
PHYSICAL PROPERTIES
SECONDARY EMISSION
SEMIMETALS
SILICON
SPUTTERING
SUPERCONDUCTING FILMS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
VERY HIGH TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES