Preparation and characterization of high T sub c YBa sub 2 Cu sub 3 O sub 7 minus x thin films on silicon by dc magnetron sputtering from a stoichiometric oxide target

Conference · Tue Jan 31 23:00:00 EST 1989 · AIP Conference Proceedings (American Institute of Physics); (USA)

OSTI ID:6948472

Lee, W Y; Salem, J; Lee, V Y; Huang, T C; Karimi, R; Deline, V; Savoy, R ^[1]; Chung, D W ^[2]

---

1. IBM Almaden Research Center, San Jose, CA 95120 (USA)
2. San Jose University, San Jose, CA 95192 (USA)

The effects of deposition temperature and O{sub 2} pressure during cool down on the superconducting properties of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} thin films on Si substrates by DC magnetron sputtering from a stoichiometric oxide target are reported. Results from X-ray diffraction analysis indicate that the films deposited at 400 {degree}C or lower, at 650 {degree}C and cooled down in {gt}10{sup {minus}4} O{sub 2}, and at 650 {degree}C and cooled down in {gt}0.16 Torr O{sub 2} have, respectively, amorphous, tetragonal, and orthorhombic structure. Superconducting orthorhombic films with a zero resistance T{sub c} of as high as 76 K have been thus prepared on Si directly, without further heat treatments. The deposition of these films on Si is possible because of the minimal film-substrate interaction at the relatively low deposition temperature used, as indicated by the depth profiles obtained for these films using secondary ion mass spectrometry. Results of cross-sectional transmission electron microscopic studies of some of these films with different {Tc} and X-ray photoemission spectroscopic studies of the amorphous, tetragonal, and orthorhombic are also reported.

• OSTI ID: 6948472
• Report Number(s): CONF-881035--
• Journal Information: AIP Conference Proceedings (American Institute of Physics); (USA), Journal Name: AIP Conference Proceedings (American Institute of Physics); (USA) Vol. 182:1; ISSN 0094-243X; ISSN APCPC
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COHERENT SCATTERING
COOLING
COPPER COMPOUNDS
COPPER OXIDES
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
HEAT TREATMENTS
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PRESSURE MEASUREMENT
SAMPLE PREPARATION
SCATTERING
SEMIMETALS
SILICON
SPUTTERING
STOICHIOMETRY
SUBSTRATES
SUPERCONDUCTIVITY
TEMPERATURE MEASUREMENT
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES